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Silicon Micromachining


Silicon micromaching is a key aspect of modern MEMS device fabrication. URMIA MEMES has developed extensive expertise in this area using a wide variety of micromachining methods. Cryogenic RIE is used for fast, high aspect ratio silicon etching. KOH and TMAH etchants are all used for bulk silicon etching and device release.


  • Cryogenic RIE silicon etch
  • SOI handle etch
  • KOH bulk etching
  • TMAH etch and release