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Silicon Micromachining

Capture

Silicon micromaching is a key aspect of modern MEMS device fabrication. URMIA MEMES has developed extensive expertise in this area using a wide variety of micromachining methods. Cryogenic RIE is used for fast, high aspect ratio silicon etching. KOH and TMAH etchants are all used for bulk silicon etching and device release.

Capabilities

  • Cryogenic RIE silicon etch
  • SOI handle etch
  • KOH bulk etching
  • TMAH etch and release